Three-dimensional NAND flash architecture design based on single-crystalline STacked ARray

Yoon Kim; Jang Gn Yun; Se Hwan Park; Wandong Kim; Joo Yun Seo; Myounggon Kang; Kyung Chang Ryoo; Jeong Hoon Oh; Jong Ho Lee; Hyungcheol Shin; Byung Gook Park

doi:10.1109/TED.2011.2170841

Three-dimensional NAND flash architecture design based on single-crystalline STacked ARray

Yoon Kim, Jang Gn Yun, Se Hwan Park, Wandong Kim, Joo Yun Seo, Myounggon Kang, Kyung Chang Ryoo, Jeong Hoon Oh, Jong Ho Lee, Hyungcheol Shin, Byung Gook Park

Research output: Contribution to journal › Article › peer-review

81 Scopus citations

Abstract

Various critical issues related with 3-D stacked nand Flash memory are examined in this paper. Our single-crystalline STacked ARray (STAR) has many advantages such as better scalability, possibility of single-crystal channel, less sensitivity to 3-D interference, stable virtual source/drain characteristic, and more extendability over other stacked structures. With STAR, we proposed a unit 3-D structure, i.e., "building". Then, using this new component, 3-D block and full chip architecture are successfully designed. For the first time, the structure and operation methods of the "full" array are considered. The fully designed 3-D nand Flash architecture will be the novel solution of reliable 3-D stacked nand Flash memory for terabit density.

Original language	English
Article number	6062401
Pages (from-to)	35-45
Number of pages	11
Journal	IEEE Transactions on Electron Devices
Volume	59
Issue number	1
DOIs	https://doi.org/10.1109/TED.2011.2170841
State	Published - Jan 2012

Keywords

3-D block
3-D memory
3-D stacked nand Flash memory
Channel-channel (Ch-Ch) coupling
single-crystalline STacked ARray (STAR)

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10.1109/TED.2011.2170841

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title = "Three-dimensional NAND flash architecture design based on single-crystalline STacked ARray",

abstract = "Various critical issues related with 3-D stacked nand Flash memory are examined in this paper. Our single-crystalline STacked ARray (STAR) has many advantages such as better scalability, possibility of single-crystal channel, less sensitivity to 3-D interference, stable virtual source/drain characteristic, and more extendability over other stacked structures. With STAR, we proposed a unit 3-D structure, i.e., {"}building{"}. Then, using this new component, 3-D block and full chip architecture are successfully designed. For the first time, the structure and operation methods of the {"}full{"} array are considered. The fully designed 3-D nand Flash architecture will be the novel solution of reliable 3-D stacked nand Flash memory for terabit density.",

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year = "2012",

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doi = "10.1109/TED.2011.2170841",

language = "English",

volume = "59",

pages = "35--45",

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AU - Kim, Yoon

AU - Yun, Jang Gn

AU - Park, Se Hwan

AU - Kim, Wandong

AU - Seo, Joo Yun

AU - Kang, Myounggon

AU - Ryoo, Kyung Chang

AU - Oh, Jeong Hoon

AU - Lee, Jong Ho

AU - Shin, Hyungcheol

AU - Park, Byung Gook

PY - 2012/1

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N2 - Various critical issues related with 3-D stacked nand Flash memory are examined in this paper. Our single-crystalline STacked ARray (STAR) has many advantages such as better scalability, possibility of single-crystal channel, less sensitivity to 3-D interference, stable virtual source/drain characteristic, and more extendability over other stacked structures. With STAR, we proposed a unit 3-D structure, i.e., "building". Then, using this new component, 3-D block and full chip architecture are successfully designed. For the first time, the structure and operation methods of the "full" array are considered. The fully designed 3-D nand Flash architecture will be the novel solution of reliable 3-D stacked nand Flash memory for terabit density.

AB - Various critical issues related with 3-D stacked nand Flash memory are examined in this paper. Our single-crystalline STacked ARray (STAR) has many advantages such as better scalability, possibility of single-crystal channel, less sensitivity to 3-D interference, stable virtual source/drain characteristic, and more extendability over other stacked structures. With STAR, we proposed a unit 3-D structure, i.e., "building". Then, using this new component, 3-D block and full chip architecture are successfully designed. For the first time, the structure and operation methods of the "full" array are considered. The fully designed 3-D nand Flash architecture will be the novel solution of reliable 3-D stacked nand Flash memory for terabit density.

KW - 3-D block

KW - 3-D memory

KW - 3-D stacked nand Flash memory

KW - Channel-channel (Ch-Ch) coupling

KW - single-crystalline STacked ARray (STAR)

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Three-dimensional NAND flash architecture design based on single-crystalline STacked ARray

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Keywords

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