Three-dimensional NAND flash architecture design based on single-crystalline STacked ARray

Yoon Kim; Jang Gn Yun; Se Hwan Park; Wandong Kim; Joo Yun Seo; Myounggon Kang; Kyung Chang Ryoo; Jeong Hoon Oh; Jong Ho Lee; Hyungcheol Shin; Byung Gook Park

doi:10.1109/TED.2011.2170841

Three-dimensional NAND flash architecture design based on single-crystalline STacked ARray

Yoon Kim
, Jang Gn Yun
, Se Hwan Park
, Wandong Kim
, Joo Yun Seo
, Myounggon Kang
, Kyung Chang Ryoo
, Jeong Hoon Oh
, Jong Ho Lee
, Hyungcheol Shin
, Byung Gook Park

Research output: Contribution to journal › Article › peer-review

84 Scopus citations

Abstract

Various critical issues related with 3-D stacked nand Flash memory are examined in this paper. Our single-crystalline STacked ARray (STAR) has many advantages such as better scalability, possibility of single-crystal channel, less sensitivity to 3-D interference, stable virtual source/drain characteristic, and more extendability over other stacked structures. With STAR, we proposed a unit 3-D structure, i.e., "building". Then, using this new component, 3-D block and full chip architecture are successfully designed. For the first time, the structure and operation methods of the "full" array are considered. The fully designed 3-D nand Flash architecture will be the novel solution of reliable 3-D stacked nand Flash memory for terabit density.

Original language	English
Article number	6062401
Pages (from-to)	35-45
Number of pages	11
Journal	IEEE Transactions on Electron Devices
Volume	59
Issue number	1
DOIs	https://doi.org/10.1109/TED.2011.2170841
State	Published - Jan 2012

Keywords

3-D block
3-D memory
3-D stacked nand Flash memory
Channel-channel (Ch-Ch) coupling
single-crystalline STacked ARray (STAR)

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10.1109/TED.2011.2170841

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title = "Three-dimensional NAND flash architecture design based on single-crystalline STacked ARray",

abstract = "Various critical issues related with 3-D stacked nand Flash memory are examined in this paper. Our single-crystalline STacked ARray (STAR) has many advantages such as better scalability, possibility of single-crystal channel, less sensitivity to 3-D interference, stable virtual source/drain characteristic, and more extendability over other stacked structures. With STAR, we proposed a unit 3-D structure, i.e., {"}building{"}. Then, using this new component, 3-D block and full chip architecture are successfully designed. For the first time, the structure and operation methods of the {"}full{"} array are considered. The fully designed 3-D nand Flash architecture will be the novel solution of reliable 3-D stacked nand Flash memory for terabit density.",

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author = "Yoon Kim and Yun, \{Jang Gn\} and Park, \{Se Hwan\} and Wandong Kim and Seo, \{Joo Yun\} and Myounggon Kang and Ryoo, \{Kyung Chang\} and Oh, \{Jeong Hoon\} and Lee, \{Jong Ho\} and Hyungcheol Shin and Park, \{Byung Gook\}",

year = "2012",

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doi = "10.1109/TED.2011.2170841",

language = "English",

volume = "59",

pages = "35--45",

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AU - Kim, Yoon

AU - Yun, Jang Gn

AU - Park, Se Hwan

AU - Kim, Wandong

AU - Seo, Joo Yun

AU - Kang, Myounggon

AU - Ryoo, Kyung Chang

AU - Oh, Jeong Hoon

AU - Lee, Jong Ho

AU - Shin, Hyungcheol

AU - Park, Byung Gook

PY - 2012/1

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N2 - Various critical issues related with 3-D stacked nand Flash memory are examined in this paper. Our single-crystalline STacked ARray (STAR) has many advantages such as better scalability, possibility of single-crystal channel, less sensitivity to 3-D interference, stable virtual source/drain characteristic, and more extendability over other stacked structures. With STAR, we proposed a unit 3-D structure, i.e., "building". Then, using this new component, 3-D block and full chip architecture are successfully designed. For the first time, the structure and operation methods of the "full" array are considered. The fully designed 3-D nand Flash architecture will be the novel solution of reliable 3-D stacked nand Flash memory for terabit density.

AB - Various critical issues related with 3-D stacked nand Flash memory are examined in this paper. Our single-crystalline STacked ARray (STAR) has many advantages such as better scalability, possibility of single-crystal channel, less sensitivity to 3-D interference, stable virtual source/drain characteristic, and more extendability over other stacked structures. With STAR, we proposed a unit 3-D structure, i.e., "building". Then, using this new component, 3-D block and full chip architecture are successfully designed. For the first time, the structure and operation methods of the "full" array are considered. The fully designed 3-D nand Flash architecture will be the novel solution of reliable 3-D stacked nand Flash memory for terabit density.

KW - 3-D block

KW - 3-D memory

KW - 3-D stacked nand Flash memory

KW - Channel-channel (Ch-Ch) coupling

KW - single-crystalline STacked ARray (STAR)

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Three-dimensional NAND flash architecture design based on single-crystalline STacked ARray

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