V-band single-platform beam steering transmitters using micromachining technology

Sanghyo Lee, Jung Mu Kim, Jong Man Kim, Yong Kweon Kim, Changyul Cheon, Youngwoo Kwon

Research output: Contribution to journalConference articlepeer-review

10 Scopus citations


In this work, we demonstrate a novel compact mechanical beam steering transmitter based on a direct vertical integration of a 2-D MEMS-based mechanical beam steering antenna with a VCO on a single silicon platform. By eliminating the long feed lines and waveguide metal blocks, the radiation pattern has been improved vastly, resulting in an almost ideal pattern at every scan angle. The losses incurred by the feed lines and phase shifters are also eliminated, which allows the transmitter to be implemented using only a single VCO. The system complexity has been greatly reduced with a total module size of only 1.5cm × 1.5cm × 0.4cm. Also, presented in this paper is a planar electrical beam steering transmitter that integrates the MEMS-based phase shifters with VCO, PA, power divider and microstrip antennas. This work demonstrates that RF MEMS can be a key enabling technology for high-level integration.

Original languageEnglish
Article number4014843
Pages (from-to)148-151
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
StatePublished - 2006
Event2006 IEEE MTT-S International Microwave Symposium Digest - San Francisco, CA, United States
Duration: 11 Jun 200616 Jun 2006


  • Beam steering
  • Micromachining
  • Phased array
  • Transmitters
  • V-band


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